Automatic Full Wafer Optical Microscope Inspection Equipment | Intelligent Process Equipment: The Role of Smart Machinery in Automated Systems.

Automatic Wafer Inspection | Shuz Tung Machinery Industrial has won considerable trust and support from domestic and international major companies from semiconductor, flat panel display processes, Printed circuit board, intelligent medical imaging, turnkey planning for bicycles, and parts processing of automobiles, scooters, and variety of industries.

Automatic Full Wafer Optical Microscope Inspection Equipment - Automatic Full Wafer Optical Microscope Inspection Equipment
  • Automatic Full Wafer Optical Microscope Inspection Equipment - Automatic Full Wafer Optical Microscope Inspection Equipment

Automatic Full Wafer Optical Microscope Inspection Equipment

AFOM-3200

Automatic Wafer Inspection

The high-speed full-wafer defects automatic optical inspection equipment can perform high-speed full inspection for surface defects of circuit pattern wafers. The inspection resolution can be adjusted by switching the magnification of the microscopic objective lens. For 12-inch silicon wafers under pixel resolution of 1.1 micrometers, the inspection speed can reach more than 30 wafers per hour. The inspection platform can be customized to determine whether the backside of silicon wafers and glass wafers can be touched. Defect images detected are automatically reported and stored for analysis through SECS, meeting the automation requirements of intelligent production lines.

Features
  • High-speed full wafer inspection.
  • Support Silicon wafers and glass wafers.
  • Support SECS/GEM.
Applications

Wafer Size: 8 inch, 12 inch
Illumination: Bright and Dark Field LED Lighting
Objective Magnification: 2X, 5X, 10X, 20X (Optional)
Throughput: WPH ≥ 30
Auto Focusing: Coaxial Real-time Autofocus
Applications:
Exposure etching process.
Advanced wafer bumping process.


Automatic Full Wafer Optical Microscope Inspection Equipment | Made in Taiwan Intelligent Process Equipment | Shuz Tung

Based in Taiwan since 1979, Shuz Tung Machinery Industrial Co., Ltd. is a manufacturer of intelligent process equipment. It's main intelligent process equipment include, Automatic Full Wafer Optical Microscope Inspection Equipment, semiconductor automation equipment, semiconductor metrology and inspection equipment, flat panel display turnkey equipment, TFT-LCD module process whole line equipment and wafer shipper automatic packing and unpacking machines. We offer customized designs for optimal equipment efficiency in high-tech industries. Prioritizing speed of production, quality and environmental friendliness ensures competitive advantage and significant added value.

Established in 1979, with 43 years vast experience and resources in customized equipment manufacturing, and outstanding optical, mechanical, electronic, software, and system integration ability, Shuz Tung Machinery Industrial focuses on the core technologies, including Precision Mold Manufacturing, Laser Repair and Cutting, High Accuracy Bonding (PCB Bonder), Automatic Optical Inspection (AOI), Artificial Intelligence Imaging, and Turnkey Solution for Smart Manufacturing.

Shuz Tung has been providing customers with high quality intelligent process equipment since 1979, both with advanced technology and 30 years of experience, Shuz Tung ensures that each customer's needs are met.