Automatic Wafer Laser Grooving Profile Measurement Equipment
LG-3200
Automatic Wafer Inspection
Automatic Wafer Laser Grooving Profile Measurement Equipment is mainly used in the measurement of three-dimensional profile and size after laser grooving to detect products that do not meet the process specifications, so as to ensure the availability of products during wafer dicing.
Features
- 8 and 12 inch wafer frame cassette automatic loading and unloading.
- Automatic wafer alignment and focusing.
- Nano-resolution three-dimensional measurement.
- Support SECS / GEM communication.
Specification
- Objective Magnification: 2.5X, 5X, 10X, 20X, 50X, 100X, 150X (Optional)
- Height Measurement Repeatability: ≤ 0.5μm
- Measuring Items: Laser Depth, Laser Scribe Width, Scribe Top Width, Scribe Bottom Width, Scribe Shift, Surface Roughness
- Equipment Size: 2200mm (L) x 1400mm (W) x 1900mm (H)
Automatic Wafer Laser Grooving Profile Measurement Equipment | Made in Taiwan Intelligent Process Equipment | Shuz Tung
Based in Taiwan since 1979, Shuz Tung Machinery Industrial Co., Ltd. is a manufacturer of intelligent process equipment. It's main intelligent process equipment include, Automatic Wafer Laser Grooving Profile Measurement Equipment, semiconductor automation equipment, semiconductor metrology and inspection equipment, flat panel display turnkey equipment, TFT-LCD module process whole line equipment and wafer shipper automatic packing and unpacking machines. We offer customized designs for optimal equipment efficiency in high-tech industries. Prioritizing speed of production, quality and environmental friendliness ensures competitive advantage and significant added value.
Established in 1979, with 43 years vast experience and resources in customized equipment manufacturing, and outstanding optical, mechanical, electronic, software, and system integration ability, Shuz Tung Machinery Industrial focuses on the core technologies, including Precision Mold Manufacturing, Laser Repair and Cutting, High Accuracy Bonding (PCB Bonder), Automatic Optical Inspection (AOI), Artificial Intelligence Imaging, and Turnkey Solution for Smart Manufacturing.
Shuz Tung has been providing customers with high quality intelligent process equipment since 1979, both with advanced technology and 30 years of experience, Shuz Tung ensures that each customer's needs are met.